A sakamakon matsin lamba da ake fuskanta wajen buƙatar "babu lahani" a masana'antar semiconductor, safar hannu na Lijie mai inci 9 mai ƙarancin chlorine nitrile sun zama kayan kariya masu mahimmanci a cikin sarrafa wafer da marufi na guntu saboda ƙarancin ragowar ionic da aikin tsafta mai yawa. Ta hanyar sarrafawa ta musamman, ana sarrafa sinadarin chlorine na safar hannu sosai a ≤50ppm - wanda ya zarce ma'aunin masana'antu na 100ppm. Wannan yana hana haɗarin tsatsa da ke haifar da ƙaura daga ion chloride akan saman wafer, yana biyan buƙatun masana'antar semiconductor masu tsauri don sarrafa gurɓataccen microscopic.
A lokacin ayyukan lithography, tsaftace safar hannu yana shafar daidaiton murfin photoresist da sakamakon fallasa. An ƙera shi a cikin ɗakunan tsafta na Class 100,000 kuma ana iya cire ƙurar laser, wannan samfurin yana nuna fitar da ƙwayoyin saman ƙasa da barbashi 0.2/murabba'in inci - wanda ya cika ƙa'idodin ɗakin tsaftacewa na ISO Class 3. Wannan yana hana manne ƙananan barbashi zuwa saman wafer, ta haka yana rage lahani na lithography. Tsarin tsawon inci 9 yana ba da cikakken rufewa daga wuyan hannu zuwa tafin hannu. Tare da tsarin madauri mai roba, yana tabbatar da sassaucin aiki yayin da yake hana zubar ƙura a buɗewar hannun riga, yana biyan buƙatun tsauraran buƙatun muhalli masu tsafta a cikin hanyoyin lithography.
A lokacin da ake amfani da sinadaran da ke lalata fata kamar su etching da dasa ion, waɗannan safar hannu suna nuna juriyar sinadarai masu ban mamaki. Bayan gwajin nutsewa na awanni 24 a cikin na'urorin semiconductor na gama gari kamar hydrofluoric acid da phosphoric acid, ba sa nuna kumburi ko fashewa, tare da canjin nauyi ƙasa da 0.8%. Wannan yana ba da ingantaccen kariya ga masu aiki yayin da yake kawar da haɗarin gurɓatar reagent daga lalacewar safar hannu. Yatsun hannu suna da laushin laser mai siffar 0.02mm wanda aka sassaka da laser, yana ƙara gogayya da kashi 35% lokacin sarrafa wafers mai inci 12 kuma yana rage haɗarin zamewa da kashi 60%. Wannan yana cimma daidaito tsakanin aminci na kariya da kwanciyar hankali na aiki.
A halin yanzu an tabbatar da waɗannan safofin hannu a cikin layukan samar da kayayyaki masu yawa a manyan masana'antun masana'antu, ciki har da SMIC da Hua Hong Semiconductor. Suna rage yawan sharar wafer da taɓawa da hannu ke haifarwa da kashi 38%, suna tabbatar da kansu a matsayin zaɓi mafi kyau a masana'antar semiconductor don daidaita kariyar ɗaki da ingancin aiki.
Lokacin Saƙo: Nuwamba-11-2025